MarSurf XCR 20 contour measurement driver PCV200 technical parameter

Scanning length (X direction) 0.2mm to 200mm
Measurement range (Z direction) 50mm suitable for 350mm measuring arm
25mm is suitable for 175mm measuring arm
Measurement system (X direction) high-precision grating measurement system

(Factory calibrated with laser interferometer)
Measurement System (Z-Direction) Inductive Sensor, High Accuracy, High Linearity
0.38 μ m (15 μ m) is suitable for

175mm (6.89in) measuring arm
Measurement point distance (X direction) 1.0 μ m to 8.0 μ m
Travel deviation<1 μ m
Force measurement (Z direction) 1mN to 120mN downwards and upwards (can be set in software)
When the travel angle decreases downwards, it does not exceed 88 °, and when it increases upwards, it does not exceed 77 °
Measurement speed (X direction) 0.2mm/s to 4mm/s
Speed adjustment spacing 0.1mm/s
Contact speed (Z direction) 0.1mm/s to 1mm/s

Positioning speed and adjustable from 0.1mm/s to 10mm/s
Return speed (X direction)

Positioning speed (Z direction) 0.2mm/s to 8mm/s
Measuring rod length 175mm and 350mm
Measuring needle radius 25 μ m
X+Z=Fangxian positioning accuracy of 5 μ m
The driver measures ± 45 °
Adjust the angle on the pillar

XZ two-dimensional length ± (2+L/50) μ m
measurement error

Arc surface contact error of 1.5 μ m

Angle measurement error U95<3.0min
U95<±3minR0.5mm-10mm
U95<±5minR10mm-100mm
Radius measurement error U95=± 7 μ m
R100mm-1000mm

MarSurf XCR20 roughness measurement driver GD25 technical parameter

Scan length maximum. 25.4 mm (1.00 in)
Scanning speeds of 0.1 mm/s and 0.5 mm/s

(0.0039 in/sand 0.020in/s)
Measurement error ± 2%
Positioning speed in the (+X) direction is 0.5 mm/s (0.020 in/s)
Return speed in the (- X) direction is approximately 2 mm/s (0.079 in/s)
Z-direction adjustment range of up to 4 mm (0.16 in)
Z-direction contact workpiece speed approximately 0.3 mm/s (0.012 in/s)

Rz residual contour 1) 2) at 20 nm (0.00000078 in)
0.1 mm/s (0.0039 in/s)

Rz residual contour 1) 2) at 30 nm (0.0000012 in)
0.5 mm/s (0.020 in/s)

Straightness error 0.2 μ m/25.4 mm (0.0000079in/1.00 in)
Angle adjustment range 0.5 ° (9 μ m/mm (0.00035 in/0.039in))
Limit switches below, in front, above, below
Return to starting point with repeatability<0.05 mm (0.0020 in), 0.02 mm (0.00079 in) 2K
Operate at any position
Probe type suitable for MFW250, suitable for all R pickups with joint sleeves
The V-shaped base is suitable for cylindrical workpieces with a diameter of 30mm30mm.... 30mm.... 30mm....
Support feet suitable for flat or cylindrical workpieces>72 mm (>2.83 in)